%0 Journal Article
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@nexthigherunit 8JMKD3MGPCW/3ET2RFS
%@archivingpolicy denypublisher denyfinaldraft24
%@issn 0257-8972
%@usergroup administrator
%@usergroup simone
%3 numerical simulation.pdf
%X The behavior of plasma and sheath characteristics under the action of an applied magnetic field is important in many applications including plasma probes and material processing. Plasma immersion ion implantation (PIII) has been developed as a fast and efficient surface modification technique of complex shaped three-dimensional objects. The PIII process relies on the acceleration of ions across a high-voltage plasma sheath that develops around the target. Recent studies have shown that the sheath dynamics is significantly affected by an external magnetic field. In this work we describe a two-dimensional computer simulation of magnetic field enhanced plasma immersion implantation system. Negative bias voltage is applied to a cylindrical target located on the axis of a grounded cylindrical vacuum chamber filled with uniform nitrogen plasma. An axial magnetic field is created by a solenoid installed inside the cylindrical target. The computer code employs the Monte Carlo method for collision of electrons and neutrals in the plasma and a particle-in-cell (PIC) algorithm for simulating the movement of charged particles in the electromagnetic field. Secondary electron emission from the target subjected to ion bombardment is also included. It is found that a high-density plasma region is formed around the cylindrical target due to the intense background gas ionization by the magnetized electrons drifting in the crossed ExB fields. An increase of implantation current density in front of high density plasma region is observed.
%T Numerical simulation of magnetic field enhanced plasma immersion ion implantation
%@secondarytype PRE PI
%K PIII, Computer Simulation, Magnetic field, Ion Implantation.
%@visibility shown
%@group
%@group LAP-INPE-MCT-BR
%@group LAP-INPE-MCT-BR
%@secondarykey INPE--PRE/
%2 sid.inpe.br/mtc-m17@80/2007/06.29.18.52.17
%@affiliation Faculdade de Engenharia de Guaratinguetá. Universidade Estadual Paulista (UNESP.FEG)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Surface and Coatings Technology
%4 sid.inpe.br/mtc-m17@80/2007/06.29.18.52
%D 2007
%V In press
%A Kostov, K. G.,
%A Barroso, Joaquim José de,
%A Ueda, Mário,
%@dissemination WEBSCI; PORTALCAPES.
%@area FISPLASMA