%0 Journal Article
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@nexthigherunit 8JMKD3MGPCW/3ET2RFS
%@archivingpolicy denypublisher denyfinaldraft24
%@issn 0257-8972
%@usergroup administrator
%@usergroup simone
%3 effect of target.pdf
%X Recent studies have demonstrated that sheath dynamics in plasma immersion ion implantation (PIII) is significantly affected by an external magnetic field, especially in the case when the magnetic field is parallel to the workpiece surface or intersects it at small angles. In this work we report the results from two-dimensional, particle-in-cell (PIC) computer simulations of magnetic field enhanced plasma immersion implantation system at different bias voltages. The simulations begin with initial low-density nitrogen plasma, which extends with uniform density through a grounded cylindrical chamber. Negative bias voltage is applied to a cylindrical target located on the axis of the vacuum chamber. An axial magnetic field is created by a solenoid installed inside the target holder. A set of simulations at a fixed magnetic field of 0.0025 T at the target surface is performed. Secondary electron emission from the target subjected to ion bombardment is also included. It is found that the plasma density around the cylindrical target increases because of intense background gas ionization by the electrons drifting in the crossed E × B fields. Suppression of the sheath expansion and increase of the implantation current density in front of the high-density plasma region are observed. The effect of target bias on the sheath dynamics and implantation current of the magnetic field enhanced PIII is discussed.
%T Effect of target bias on magnetic field enhanced plasma immersion ion implantation
%@secondarytype PRE PI
%K PIII, Computer simulation, Magnetic field, Sheath.
%@visibility shown
%@group
%@group LAP-INPE-MCT-BR
%@group LAP-INPE-MCT-BR
%@secondarykey INPE--PRE/
%2 sid.inpe.br/mtc-m17@80/2007/06.29.18.47.46
%@affiliation Faculdade de Engenharia de Guaratinguetá. Universidade Estadual Paulista. (UNESP.FEG)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Surface and Coatings Technology
%4 sid.inpe.br/mtc-m17@80/2007/06.29.18.47
%D 2007
%V In press
%A Kostov, K. G.,
%A Barroso, Joaquim José de,
%A Ueda, Mário,
%@dissemination WEBSCI; PORTALCAPES.
%@area FISPLASMA