%0 Journal Article %@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S} %@nexthigherunit 8JMKD3MGPCW/3ESR3H2 %@archivingpolicy denypublisher denyfinaldraft12 %@usergroup administrator %@usergroup simone %3 Adherent diamond like.pdf %2 sid.inpe.br/mtc-m17@80/2006/12.06.18.24.30 %4 sid.inpe.br/mtc-m17@80/2006/12.06.18.24 %X Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVD and IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the a-C:H films on the metal substrates. The XPS technique was employed to analyze the chemical bondings within the interfaces. The elemental composition and atomic density of the films were determined by ion beam analysis. The film microstructure was studied by means of Raman scattering spectroscopy. The mechanical properties were determined by means of stress and hardness measurements. The adherence was evaluated by means of scratch tests. The tests showed that the composition, the microstructure, and the mechanical properties of the films depend on the intensity of the ion bombardment and on the ion current. %8 set. %N 3B %T Adherent diamond-like carbon coatings on metals via PECVD and IBAD %@secondarytype PRE PN %K Diamond-like carbon, Plasma enhanced chemical vapor deposition, Ion beam-assisted deposition. %@group LAS-INPE-MCT-BR %@group LAS-INPE-MCT-BR %@group LAS-INPE-MCT-BR %@group LAS-INPE-MCT-BR %@group LAS-INPE-MCT-BR %@secondarykey INPE-14424-PRE/9508 %@copyholder SID/SCD %@issn 0103-9733 %@affiliation Instituto Nacional de Pesquisas Espaciais (INPE) %@affiliation Instituto Nacional de Pesquisas Espaciais (INPE) %@affiliation Instituto Nacional de Pesquisas Espaciais (INPE) %@affiliation Instituto Nacional de Pesquisas Espaciais (INPE) %@affiliation Instituto Nacional de Pesquisas Espaciais (INPE) %B Brazilian Journal of Physics %P 986-989 %D 2006 %V 36 %A Rodrigues, Gil Capote, %A Bonetti, Luís Francisco, %A Santos, Lúcia Vieira, %A Trava-Airoldi, Vladimir Jesus, %A Corat, Evaldo José, %@dissemination WEBSCI; PORTALCAPES; SCIELO. %@area FISMAT