| 1. Identificação | |
| Tipo de Referência | Artigo em Revista Científica (Journal Article) |
| Site | mtc-m16b.sid.inpe.br |
| Código do Detentor | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identificador | 6qtX3pFwXQZGivnK2Y/UugL7 |
| Repositório | sid.inpe.br/mtc-m17@80/2008/06.17.13.57 (acesso restrito) |
| Última Atualização | 2008:06.17.13.57.55 (UTC) administrator |
| Repositório de Metadados | sid.inpe.br/mtc-m17@80/2008/06.17.13.57.56 |
| Última Atualização dos Metadados | 2018:06.05.03.30.51 (UTC) administrator |
| Chave Secundária | INPE--PRE/ |
| DOI | 10.1016/j.tsf.2007.08.007 |
| ISSN | 0040-6090 |
| Chave de Citação | GilBonSanTraCor:2008:AdAmHy |
| Título | Adherent amorphous hydrogenated carbon films on metals deposited by plasma enhanced chemical vapor deposition  |
| Ano | 2008 |
| Mês | Apr. |
| Data de Acesso | 07 maio 2024 |
| Tipo Secundário | PRE PI |
| Número de Arquivos | 1 |
| Tamanho | 621 KiB |
| 2. Contextualização | |
| Autor | 1 Gil, Capote 2 Bonetti, Luis Fernando 3 Santos, Lúcia Vieira 4 Trava Airoldi, Vladimir Jesus 5 Corat, Evaldo José |
| Identificador de Curriculo | 1 2 3 4 8JMKD3MGP5W/3C9JJBK |
| Grupo | 1 LAS-CTE-INPE-MCT-BR 2 LAS-CTE-INPE-MCT-BR 3 LAS-CTE-INPE-MCT-BR 4 LAS-CTE-INPE-MCT-BR 5 LAS-CTE-INPE-MCT-BR |
| Afiliação | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Revista | Thin Solid Films |
| Volume | 516 |
| Número | 12 |
| Páginas | 4011-4017 |
| Histórico (UTC) | 2008-06-17 13:57:56 :: simone -> administrator :: 2012-07-13 22:33:00 :: administrator -> simone :: 2013-02-20 15:20:20 :: simone -> administrator :: 2008 2018-06-05 03:30:51 :: administrator -> marciana :: 2008 |
| 3. Conteúdo e estrutura | |
| É a matriz ou uma cópia? | é a matriz |
| Estágio do Conteúdo | concluido |
| Transferível | 1 |
| Tipo do Conteúdo | External Contribution |
| Palavras-Chave | amorphous hydrogenated carbon plasma enhanced chemical vapor deposition silicon interlayer adhesion X-ray photoelectron spectra mechanical properties |
| Resumo | This paper reports the findings of a study of the structural, mechanical, and tribological properties of amorphous hydrogenated carbon (a-C:H) coatings for industrial applications. These thin films have proven quite advantageous in many tribological applications, but for others, thicker films are required. In this study, in order to overcome the high residual stress and low adherence of a-C:H films on metal substrates, a thin amorphous silicon interlayer was deposited as an interface. Amorphous silicon and a-C:H films were grown by using a radio frequency plasma enhanced chemical vapor deposition system at 13.56 MHz in silane and methane atmospheres, respectively. The X-ray photoelectron spectroscopy technique was employed to analyze the chemical bonding within the interfaces. The chemical composition and atomic density of the a-C:H films were determined by ion beam analysis. The film microstructure was studied by means of Raman scattering spectroscopy. The total stress was determined through the measurement of the substrate curvature, using a profilometer, while micro-indentation experiments helped determine the films' hardness. The friction coefficient and critical load were evaluated by using a tribometer. The results showed that the use of the amorphous silicon interlayer improved the a-C:H film deposition onto metal substrates, producing good adhesion, low compressive stress, and a high degree of hardness. SiC was observed in the interface between the amorphous silicon and a-C:H films. The composition, the microstructure, the mechanical and tribological properties of the films were strongly dependent on the self-bias voltages. The tests confirmed the importance of the intensity of ion bombardment during film growth on the mechanical and tribological properties of the films. (c) 2007 Elsevier B.V. All rights reserved. |
| Área | FISMAT |
| Arranjo | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Adherent amorphous hydrogenated... |
| Conteúdo da Pasta doc | acessar |
| Conteúdo da Pasta source | não têm arquivos |
| Conteúdo da Pasta agreement | não têm arquivos |
| 4. Condições de acesso e uso | |
| Idioma | en |
| Arquivo Alvo | adherent amorphous.pdf |
| Grupo de Usuários | administrator simone |
| Visibilidade | shown |
| Política de Arquivamento | denypublisher denyfinaldraft24 |
| Permissão de Leitura | deny from all and allow from 150.163 |
| 5. Fontes relacionadas | |
| Unidades Imediatamente Superiores | 8JMKD3MGPCW/3ESR3H2 |
| Divulgação | WEBSCI; PORTALCAPES. |
| Acervo Hospedeiro | lcp.inpe.br/ignes/2004/02.12.18.39 cptec.inpe.br/walmeida/2003/04.25.17.12 |
| 6. Notas | |
| Campos Vazios | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel documentstage e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Controle da descrição | |
| e-Mail (login) | marciana |
| atualizar | |